Zhishun Wang, Columbia University
Date : November 8, 2006 (Wednesday)
Time : Time: 7 PM (refreshment starts at 6:15 PM)
Location : ECEC 202, NJIT

About the Speaker

Lucille A. Giannuzzi received her BE and MS Degrees from SUNY Stony Brook, and her PhD Degree from The Pennsylvania State University.  She spent ten years at the University of Central Florida where she was the recipient of an NSF Career Award.  As Professor of Mechanical Materials & Aerospace Engineering, her primary research interests included ion/solid interactions and the microstructural evaluation of materials using focused ion beams and transmission electron microscopy.  She has been with FEI Company as a field product marketing engineer for FIB/DualBeam systems for the past three years.  She is on the editorial board of the journal, Microscopy and Microanalysis and participates as an instructor in the Lehigh Microscopy School.  She is active in the local and national chapters of AVS, MSA and MAS.  She has been a local affiliate speaker for both MSA and the MAS and is co-editor of a book entitled, “Introduction to Focused Ion Beams.”

About the Talk

The basic concepts of ion-solid interactions and focused ion beam (FIB) instrumentation and theory will be presented.  Examples of basic FIB milling and the uses of gases for chemical vapor deposition and gas enhanced etching will be given.  The first uses of FIB in the semiconductor industry for device modification and circuit repair have extending into many applications, materials research, and industrial markets.  The applications of FIB and DualBeam usage on multiple material systems in numerous industries have been realized, and examples of FIB milling for many material systems will be shown.  Uses of the DualBeam platform for nanotechnology applications will be described, showing that the utilization of such a tool is limited only by one’s imagination.  FIB milling techniques for specimen preparation for scanning electron microscopy (SEM), transmission electron microscopy (TEM), and other analytical tools will be presented.  In particular, the ex-situ lift-out and in-situ lift-out TEM techniques will be presented in detail, and the applications of these specimen preparation methods for many TEM and Scanning TEM techniques will be emphasized.  The concepts and advantages of a dual platform FIB and scanning electron microscope (SEM) will be discussed.  In particular, the development of the combined FIB/SEM DualBeam instrumentation as a nano-lab and a 3D characterization tool which including microstructure, elemental composition, and crystallographic information will be given.  Examples of using the DualBeam as a 30 keV scanning transmission electron microscope will also be presented.

Sponsors

IEEE NJ Section Electron Devices, Circuits and Systems Chapters
Department of Electrical and Computer Engineering, NJIT

More information: contact Dr. Richard Snyder (973) 492-1207 (RS Microwave), Dr. Edip Niver (973) 596-3542 (NJIT), or Dr. Durga Misra (973) 596-5739 (dmisra “AT” njit.edu).